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Multi-module semi-automaton
Key words:
Multi-module semi-automaton
Category:
Trough wet process equipment - non-standard customization
Product accessories:
Hotline:
Multi-module semi-automaton
Device functions and information overview:
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Equipment characteristics |
IPA Dry and Spin Dry options are available |
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Multiple recipes can be preset, simple operation, can support multiple batches of cleaning to improve production |
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Different kinds of emission schemes can be developed according to different factory requirements |
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Different liquid supply schemes can be formulated according to different factory requirements |
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Effectively control the cross contamination of metals, materials and particles |
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Modular design of software and hardware |
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MES communication ports are reserved for hardware and software |
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Real-time recording of production data, a variety of data analysis functions |
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SECS/GEM interface is optional |
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According to process requirements, modular design and Leak Sensor configuration |
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It can realize the traceability of workpiece data, and has the functions of passing point information, status monitoring, fault summary, order issuance, etc |
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